Sunday 09 March 2025
Researchers have developed a new approach to analyzing the chemical makeup of tiny structures, like those found in computer chips and medical devices. This method combines two powerful tools: Focused Ion Beam-Secondary Ion Mass Spectrometry (FIB-SIMS) and Atom Probe Tomography (APT).
FIB-SIMS is a technique that uses a focused beam of ions to sputter – or knock off – atoms from the surface of a material. The atoms are then detected by mass spectrometry, which separates them based on their mass-to-charge ratio. This allows researchers to create detailed maps of the chemical composition of a sample.
APT, on the other hand, is a technique that uses a high-voltage electric field to evaporate individual atoms from the surface of a material. These atoms are then detected by a position-sensitive detector, which creates a three-dimensional map of the atom’s location and chemical identity.
By combining these two techniques, researchers can gain a much deeper understanding of the chemical makeup of tiny structures. The FIB-SIMS data provides a broad overview of the composition, while the APT data provides detailed information about the distribution of different elements within the structure.
The new approach has already been tested on several samples, including a computer chip and a medical device. In each case, the researchers were able to create high-resolution maps of the chemical composition, revealing details that would have been difficult or impossible to obtain with either technique alone.
One of the biggest advantages of this new approach is its ability to analyze very small structures. The FIB-SIMS beam can be focused down to a diameter of just 10 nanometers, allowing researchers to study features that are smaller than previously possible.
The combination of FIB-SIMS and APT also provides a level of spatial resolution that was not previously possible. With traditional SIMS techniques, it is difficult to distinguish between different elements that are present in small quantities. The high-resolution maps created by the new approach allow researchers to identify even small changes in chemical composition.
In addition to its potential applications in materials science and engineering, this new approach could also have implications for fields like biology and medicine. For example, researchers could use it to study the distribution of different biomolecules within cells or tissues.
Overall, this new approach represents a significant advancement in our ability to analyze the chemical makeup of tiny structures.
Cite this article: “High-Resolution Analysis of Tiny Structures using FIB-SIMS and APT”, The Science Archive, 2025.
Focused Ion Beam-Secondary Ion Mass Spectrometry, Atom Probe Tomography, Chemical Composition, Materials Science, Engineering, Biology, Medicine, Biomolecules, Cells, Tissues
